资源

https://si.ldyycf.xyz/?p=33
https://web.stanford.edu/class/ee328/swb/
论坛
https://bbs.eetop.cn/
https://bbs.eetop.cn/thread-265421-1-1.html
https://bbs.21ic.com/
课程
https://inst.eecs.berkeley.edu/~ee130/fa13/project/
http://www.micro.deis.unibo.it/~rudan/MATERIALE_DIDATTICO/diapositive/TCAD/

安装

https://zhuanlan.zhihu.com/p/28517634
https://zhuanlan.zhihu.com/p/29150773
最简单的方法是找到已经安装好的虚拟机。

快速纵观入门理解

知乎懒小木live
https://www.zhihu.com/lives/923576641542848512

模块了解

MOOC半导体器件原理与模拟设计课程
https://www.icourse163.org/course/ECNU-1003476011?tid=1206787208

例如Sentaurus Process的了解。
可直接跳：
4.4.1 npn晶体管的一维Sentaurus Process介绍建模过程
使用文件夹terminal方式运行

sprocess 1D_npn_fps.cmd 

之后可以用inspect查看plx曲线。

1D_npn_fps.cmd 如下：

#decleare  line x location=4.0 tag=SubTop spacing= 20.0 line x location=4.5 spacing= 40.0 line x location=6.0 tag=SubBottom spacing= 0.2 region Silicon xlo=SubTop xhi=SubBottom init concentration=1e 15 field=Boron mgoals normal.growth.ratio=1.1 min.normal.size=20 max.lateral.size=0.2  # Buried layer (deposit screen ox, implant) deposit Oxide type=isotropic thickness=25.0 implant Antimony dose=1.5e15 energy=100.0 tilt=0 rotation=0 SetPlxList {BTotal Antimony_Implant} WritePlx n@node@_Sbasimp.plx # Partial drive-in  diffuse temperature=1100 time=1
 strip Oxide SetPlxList {BTotal SbTotal} WritePlx n@node@_Sbdrive.plx  # Create Epi layer deposit material=Silicon type=isotropic rate=1.0 time=4.0 species=Arsenic concentration=1e15 diffuse temperature=1100 time=1
 SetPlxList {BTotal SbTotal AsTotal} WritePlx n@node@_Epi.plx # Base screen oxide, implant and drive-in deposit Oxide isotropic thickness=25.0 implant Boron dose=1e14 energy=50 tilt=7 rotation=0 diffuse temperature=1000 time=50  # Emitter screen oxide, implant and activation implant Arsenic dose=2e15 energy=55 tilt=7 rotation=0 diffuse temperature=1000 time=35 # Show the final profiles SetPlxList {BActive SbActive AsActive} WritePlx n@node@_Final.plx  exit  

官方教程

用terminal方式 which swb安装路径可见。

教程地址：
/usr/synopsys/sentaurus/O_2018.06-SP2/tcad/O-2018.06-SP2/manuals

/usr/synopsys/sentaurus/O_2018.06-SP2/tcad/O-2018.06-SP2/Sentaurus_Training

或者下载:
https://si.ldyycf.xyz/?p=33

工艺仿真user guide
https://usermanual.wiki/Document/SentaurusSProcessUserGuide.519283346/view