AIS326DQ

MEMS惯性传感器的3轴，低g加速计，数字输出 MEMS inertial sensor 3-axis, low g accelerometer with digital output

The is a three axes digital output accelerometer that includes a sensing element and an IC interface able to take the information from the sensing element and to provide the measured acceleration signals to the external world through an SPI serial interface. I²C compatible interface is also available.

The sensing element, capable of detecting the acceleration, is manufactured using a dedicated process developed by ST to produce inertial sensors and actuators in silicon.

The IC interface instead is manufactured using a CMOS process that allows high level of integration to design a dedicated circuit which is factory trimmed to better match the sensing element characteristics.

The AIS326DQ has a user selectable full scale of ±2 g, ±6 g and it is capable of measuring acceleration over a bandwidth of 640 Hz for all axes. The device bandwidth may be selected accordingly to the application requirements. The self-test capability allows the user to check the functioning of the system.

The device is available in plastic quad flat package no lead surface mount QFPN and it is specified over a temperature range extending from -40 °C to +105 °C.

**Key Features**

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3.3 V single supply operation

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1.8 V compatible IOs

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SPI digital output interface

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12 bit resolution

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Interrupt activated by motion

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Programmable interrupt threshold

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Embedded self-test

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High shock survivability

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ECOPACK® compliant

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Extended temperature range -40 °C to +105 °C